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1.发明申请METHOD FOR THE DECOUPLED CONTROL OF THE QUADRATURE AND THE RESONANCE FREQUENCY OF A MICRO-MECHANICAL ROTATION RATE SENSOR BY MEANS OF SIGMA-DELTA-MODULATION 有权用于通过SIGMA-DELTA调制方法解决微机电转速传感器的平坦度和谐振频率的方法公开(公告)号：US20130197858A1
公开(公告)日：2013-08-01
申请号：US13634585
申请日：2011-03-17
Applicant: Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
Inventor： Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
IPC: G01P3/14
CPC classification number: G01P3/14 , G01C19/56 , G01C19/5712 , G01C19/5726
Abstract: A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
Abstract translation: 一种用于精确测量微机械旋转速率传感器的方法，所述微机械旋转速率传感器包括至少一个地震质量块，用于驱动主模式（q1）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（uT，UT，0），正交变量（uc，UC，0）和恢复变量（uS）来调整每个修整电压（u1，u2，u3，u4）。
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2.发明授权公开(公告)号：US09377483B2
公开(公告)日：2016-06-28
申请号：US13634301
申请日：2011-03-17
Applicant: Markus Egretzberger , Florian Mair , Andreas Kugi
Inventor： Markus Egretzberger , Florian Mair , Andreas Kugi
IPC: G01C19/56 , G01P15/125 , G01C19/5726
CPC classification number: G01P15/125 , G01C19/56 , G01C19/5726
Abstract: A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũT, ŨT,0) and a restoring variable (ũS).
Abstract translation: 一种用于微机械转速传感器的精确测量操作的方法，包括至少一个地震质量，用于驱动主模式（qi）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在所述修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（ũT，ŨT，0），正交变量（ũT，ŨT，0）和恢复变量（ũS））调整每个微调电压（u1，u2，u3，u4）。
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3.发明授权公开(公告)号：US09535084B2
公开(公告)日：2017-01-03
申请号：US13634585
申请日：2011-03-17
Applicant: Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
Inventor： Markus Egretzberger , Andreas Kugi , Florian Mair , Michael Maurer , Yiannos Manoli , Thomas Northemann
IPC: G01P3/00 , G01P3/14 , G01C19/5712 , G01C19/5726 , G01C19/56
CPC classification number: G01P3/14 , G01C19/56 , G01C19/5712 , G01C19/5726
Abstract: A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
Abstract translation: 一种用于精确测量微机械旋转速率传感器的方法，所述微机械旋转速率传感器包括至少一个地震质量块，用于驱动主模式（q1）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（ũT，ŨT，0），正交变量（ũc，ŨC，0）和恢复变量（ũS），调整每个微调电压（u1，u2，u3，u4）。
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4.发明申请公开(公告)号：US20130199263A1
公开(公告)日：2013-08-08
申请号：US13634301
申请日：2011-03-17
Applicant: Markus Egretzberger , Florian Mair , Andreas Kugi
Inventor： Markus Egretzberger , Florian Mair , Andreas Kugi
IPC: G01P15/125
CPC classification number: G01P15/125 , G01C19/56 , G01C19/5726
Abstract: A method for the precise measuring operation of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (qi) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between said trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũT, ŨT,0) and a restoring variable (ũS).
Abstract translation: 一种用于微机械转速传感器的精确测量操作的方法，包括至少一个地震质量，用于驱动主模式（qi）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在所述修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（uT，UT，0），正交变量（uT，UT，0）和恢复变量（uS）来调整每个修整电压（u1，u2，u3，u4）。
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