摘要:
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
摘要:
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
摘要:
A device for measuring yaw rate, having a mechanical yaw rate sensor, which has an inert mass that can be set into a primary vibration along a primary axis by means of an excitation device and can be deflected along a secondary axis extending transversely with respect to the primary axis so that when a yaw rate occurs about a sensitive axis extending transversely with respect to the primary and to the secondary axis, said device carries out a secondary vibration excited by the Coriolis force. A sensor element detects an amplitude-modulated signal for the secondary vibration. A sigma-delta modulator has a low pass filter connected to the sensor element, a quantizer and a secondary actuator disposed in a feedback path for applying a force which counteracts the Coriolis force.
摘要:
A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.
摘要:
A measuring device has a micro-electromechanical capacitive sensor which has electrodes which move toward and away from each other for measurement of a mechanical deflection of a test mass. The measuring device has a charge integrator which has an operating amplifier which has at least one amplifier input connected to the sensor and an amplifier output which is fed back to the amplifier input via an integration capacitor. The amplifier input is connected via a high-resistance electrical resistor to a terminal for an electrical common-mode reference potential. In addition to the amplifier input, the operating amplifier has an auxiliary input. The amplifier output is connected to the auxiliary input via a deep pass.