发明申请
- 专利标题: ASSEMBLY OF A CAPACITIVE ACOUSTIC TRANSDUCER OF THE MICROELECTROMECHANICAL TYPE AND PACKAGE THEREOF
- 专利标题(中): 微电子式电容式电容式传感器的组装及其封装
-
申请号: US13861324申请日: 2013-04-11
-
公开(公告)号: US20130221457A1公开(公告)日: 2013-08-29
- 发明人: Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
- 申请人: STMicroelectronics S.r.I.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.I.
- 当前专利权人: STMicroelectronics S.r.I.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: EP09425179.0 20090511
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; B81C1/00
摘要:
A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.
公开/授权文献
信息查询