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1.发明申请MAGNETIC FIELD SENSOR INCLUDING AN ANISOTROPIC MAGNETORESISTIVE MAGNETIC SENSOR AND A HALL MAGNETIC SENSOR 审中-公开磁场传感器，包括ANISOTROPIC磁感应磁传感器和霍尔磁传感器公开(公告)号：US20130127454A1
公开(公告)日：2013-05-23
申请号：US13683922
申请日：2012-11-21
CPC分类号： G01R33/096 , G01R33/0005 , G01R33/0206 , G01R33/07 , H01L43/14
摘要： A magnetic field sensor, including a Hall magnetic sensor, formed within a first die and configured to detect a first magnetic field, and a first anisotropic magnetoresistive magnetic sensor, having a first anisotropic magnetoresistive transducer, formed within a second die and configured to generate an electrical measurement quantity as a function of a second magnetic field. An electronic reading circuit formed within the first die, is electrically connected to the first anisotropic magnetoresistive transducer, and provides a first measure indicating the second magnetic field, on the basis of the electrical measurement quantity. The first and second dice are fixed with respect to one another and have main surfaces parallel to the same reference plane. The first magnetic field being oriented in a first direction perpendicular to the reference plane and the second magnetic field being oriented in a second direction parallel to the reference plane.
摘要翻译： 包括形成在第一管芯内并构造成检测第一磁场的霍尔磁传感器的磁场传感器和具有第一各向异性磁阻传感器的第一各向异性磁阻传感器，形成在第二管芯内，并被配置为产生 电测量量作为第二磁场的函数。 形成在第一管芯内的电子读取电路电连接到第一各向异性磁阻换能器，并且基于电测量量提供指示第二磁场的第一测量。 第一和第二骰子相对于彼此固定，并且主表面平行于相同的参考平面。 第一磁场在垂直于参考平面的第一方向上取向，而第二磁场沿平行于参考平面的第二方向定向。
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2.发明申请ASSEMBLY OF A CAPACITIVE ACOUSTIC TRANSDUCER OF THE MICROELECTROMECHANICAL TYPE AND PACKAGE THEREOF 审中-公开微电子式电容式电容式传感器的组装及其封装公开(公告)号：US20140299949A1
公开(公告)日：2014-10-09
申请号：US14312307
申请日：2014-06-23
CPC分类号： B81C1/00158 , B81B3/0018 , B81B7/0061 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48479 , H01L2924/00014 , H01L2924/16151 , H01L2924/16152 , H04R1/04 , H04R1/06 , H04R1/086 , H04R1/2838 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2224/48471 , H01L2224/4554 , H01L2924/00012
摘要： A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.
摘要翻译： 微机电声换能器组件具有：集成具有膜的MEMS感测结构的第一模具，其具有与前室相反流体连通的第一表面和与第一表面相对的第二表面，其与背面流体连通 微机电声换能器的腔室能够经受作为入射声压波函数的变形，并且面向刚性电极以形成可变电容电容器; 集成了可操作地耦合到MEMS感测结构并且提供作为电容变化的函数的电输出信号的电子阅读电路; 以及包装体，其容纳所述第一模具和所述第二模具，并且具有带有外部电触点的基底基板。 第一和第二骰子堆叠在包装中并机械和电气直接连接在一起; 该包装限定前室和后室中的至少一个。
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3.发明申请公开(公告)号：US20130221457A1
公开(公告)日：2013-08-29
申请号：US13861324
申请日：2013-04-11
CPC分类号： B81C1/00158 , B81B3/0018 , B81B7/0061 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48479 , H01L2924/00014 , H01L2924/16151 , H01L2924/16152 , H04R1/04 , H04R1/06 , H04R1/086 , H04R1/2838 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2224/48471 , H01L2224/4554 , H01L2924/00012
摘要： A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.
摘要翻译： 微机电声换能器组件具有：集成具有膜的MEMS感测结构的第一模具，其具有与前室相反流体连通的第一表面和与第一表面相对的第二表面，与第一表面流体连通， 微机电声换能器的腔室能够经受作为入射声压波函数的变形，并且面向刚性电极以形成可变电容电容器; 集成了可操作地耦合到MEMS感测结构并且提供作为电容变化的函数的电输出信号的电子阅读电路; 以及包装体，其容纳所述第一模具和所述第二模具，并且具有带有外部电触点的基底基板。 第一和第二骰子堆叠在包装中并机械和电气直接连接在一起; 该包装限定前室和后室中的至少一个。
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4.发明申请公开(公告)号：US20150001645A1
公开(公告)日：2015-01-01
申请号：US14316583
申请日：2014-06-26
CPC分类号： B81B7/0061 , B81B2201/0264 , B81B2203/0127 , B81B2207/012 , B81C1/00269 , B81C2203/0118 , H01L2224/32145 , H01L2224/48091 , H01L2224/73265 , H01L2924/10155 , H01L2924/15151 , H01L2924/181 , H01L2924/00014 , H01L2924/00012
摘要： A MEMS device wherein a die of semiconductor material has a first face and a second face. A membrane is formed in or on the die and faces the first surface. A cap is fixed to the first face of the first die and is spaced apart from the membrane by a space. The die is fixed, on its second face, to an ASIC, which integrates a circuit for processing the signals generated by the die. The ASIC is in turn fixed on a support. A packaging region coats the die, the cap, and the ASIC and seals them from the outside environment. A fluidic path is formed through the support, the ASIC, and the first die, and connects the membrane and the first face of the die with the outside, without requiring holes in the cap.
摘要翻译： 一种MEMS器件，其中半导体材料的管芯具有第一面和第二面。 在模具中或模具上形成膜并面向第一表面。 盖子固定在第一模具的第一面上并且与隔膜隔开一个空间。 芯片在其第二面被固定到ASIC，其集成了用于处理由芯片产生的信号的电路。 ASIC依次固定在支持上。 包装区域涂覆模具，盖子和ASIC，并将它们与外部环境密封。 通过支撑件，ASIC和第一模具形成流体路径，并且将膜和模具的第一面与外部连接，而不需要在盖中的孔。
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