Invention Application
- Patent Title: PATTERN-FORMING METHOD, AND RADIATION-SENSITIVE COMPOSITION
- Patent Title (中): 图案形成方法和辐射敏感性组合物
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Application No.: US13866093Application Date: 2013-04-19
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Publication No.: US20130230804A1Publication Date: 2013-09-05
- Inventor: Hirokazu SAKAKIBARA , Masafumi HORI , Taiichi FURUKAWA , Koji ITO
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2010-237767 20101022
- Main IPC: G03F7/027
- IPC: G03F7/027

Abstract:
A pattern-forming method includes providing a resist film on a substrate using a radiation-sensitive composition. The resist film is exposed. The exposed resist film is developed using a developer solution. The developer solution includes no less than 80% by mass of an organic solvent. The radiation-sensitive composition includes at least two components including a first polymer and a radiation-sensitive acid generator. The first polymer includes a structural unit having an acid-labile group. One or more components of the radiation-sensitive composition have a group represented by a formula (1). A− represents —N−—SO2—RD, —COO−, —O− or —SO3−. —SO3− does not directly bond to a carbon atom having a fluorine atom. RD represents a linear or branched monovalent hydrocarbon group, or the like. X+ represents an onium cation. -A−X+ (1)
Public/Granted literature
- US09034559B2 Pattern-forming method, and radiation-sensitive composition Public/Granted day:2015-05-19
Information query
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