发明申请
- 专利标题： Actuating Apparatus, Actuating System And Method For Actuating A Working Stage To Move Relative To A Platform With High-Precision Positioning Capability
- 专利标题（中）： 执行装置，执行系统及方法相对于具有高精度定位能力的平台移动工作阶段
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申请号： US13416229申请日： 2012-03-09
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公开(公告)号： US20130235389A1公开(公告)日： 2013-09-12
- 发明人: Yi-Yuh Hwang , Chin-Der Hwang , Chih-Ming Liao , Ting-Wei Chiang , Wei-Guo Chang , Wen-Cheng Huang
- 申请人： Yi-Yuh Hwang , Chin-Der Hwang , Chih-Ming Liao , Ting-Wei Chiang , Wei-Guo Chang , Wen-Cheng Huang
- 申请人地址： TW Taoyuan County
- 专利权人： Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense
- 当前专利权人： Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense
- 当前专利权人地址： TW Taoyuan County
- 主分类号： G01C21/00
- IPC分类号： G01C21/00
摘要：
An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position.