摘要:
The present invention mainly provides a precision calibration method for being applied in a high-precise rotary encoder system, wherein the primary technology feature of the precision calibration method is that: using a laser speckle image capturing module to capture N frames of laser speckle image from an optical position surface of a rotary encoding body, and then using image comparison libraries and particularly-designed mathematical equations to calculate N number of image displacements, so as to eventually calculate N number of primary variation angles and sub variation angles corresponding to the N frames of laser speckle image. Therefore, after the rotary encoding body is rotated by an arbitrary angle, an immediate angle coordinate can be precisely positioned according to the primary variation angles, the secondary variation angles and the N number of image displacements.
摘要:
An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position.
摘要:
An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position.