PRECISION CALIBRATION METHOD FOR HIGH-PRECISE ROTARY ENCODER
    1.
    发明申请
    PRECISION CALIBRATION METHOD FOR HIGH-PRECISE ROTARY ENCODER 有权
    高精度旋转编码器精度校准方法

    公开(公告)号:US20160110628A1

    公开(公告)日:2016-04-21

    申请号:US14981815

    申请日:2015-12-28

    摘要: The present invention mainly provides a precision calibration method for being applied in a high-precise rotary encoder system, wherein the primary technology feature of the precision calibration method is that: using a laser speckle image capturing module to capture N frames of laser speckle image from an optical position surface of a rotary encoding body, and then using image comparison libraries and particularly-designed mathematical equations to calculate N number of image displacements, so as to eventually calculate N number of primary variation angles and sub variation angles corresponding to the N frames of laser speckle image. Therefore, after the rotary encoding body is rotated by an arbitrary angle, an immediate angle coordinate can be precisely positioned according to the primary variation angles, the secondary variation angles and the N number of image displacements.

    摘要翻译: 本发明主要提供了一种应用于高精度旋转编码器系统的精密校准方法,其中精密校准方法的主要技术特征是:使用激光散斑图像捕获模块捕获N帧的激光散斑图像 旋转编码体的光学位置表面,然后使用图像比较库和特别设计的数学方程来计算N个图像位移,以便最终计算与N个帧对应的N个初级变化角和子变化角 的激光斑点图像。 因此,在旋转编码体旋转了任意角度后,可以根据主变化角,二次变化角和N个图像位移精确地定位立体角坐标。

    Actuating Apparatus, Actuating System And Method For Actuating A Working Stage To Move Relative To A Platform With High-Precision Positioning Capability
    2.
    发明申请
    Actuating Apparatus, Actuating System And Method For Actuating A Working Stage To Move Relative To A Platform With High-Precision Positioning Capability 有权
    执行装置,执行系统及方法相对于具有高精度定位能力的平台移动工作阶段

    公开(公告)号:US20130235389A1

    公开(公告)日:2013-09-12

    申请号:US13416229

    申请日:2012-03-09

    IPC分类号: G01C21/00

    CPC分类号: G01D5/34

    摘要: An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position.

    摘要翻译: 驱动装置包括刚性地联接到平台的运动驱动模块,由运动驱动模块驱动以相对于平台移动的工作台,刚性地耦合到工作台的散斑图像捕获模块,并能够捕获 所述平台的参考区域的子区域和可以定位模式操作的控制模块,其中所述控制模块基于所捕获的散斑图像之间的比较来获得与所述平台相关联的坐标系中的所述工作台的当前位置 以及参考斑点图像信息,其与参考区域相关联并且是唯一的,并且基于当前位置和目标位置之间的差异来控制运动驱动模块朝向坐标系中的目标位置驱动工作台。

    Actuating apparatus, actuating system and method for actuating a working stage to move relative to a platform with high-precision positioning capability
    3.
    发明授权
    Actuating apparatus, actuating system and method for actuating a working stage to move relative to a platform with high-precision positioning capability 有权
    用于致动工作台相对于具有高精度定位能力的平台移动的致动装置,致动系统和方法

    公开(公告)号:US08605294B2

    公开(公告)日:2013-12-10

    申请号:US13416229

    申请日:2012-03-09

    IPC分类号: G01B11/14

    CPC分类号: G01D5/34

    摘要: An actuating apparatus includes a motion driving module rigidly coupled to a platform, a working stage driven by the motion driving module to move relative to the platform, a speckle image capturing module rigidly coupled to the working stage and capable of capturing a speckle image of a sub-region of a reference region of the platform, and a control module operable in a positioning mode, where the control module obtains a current position of the working stage in a coordinate system associated with the platform based on a comparison between the captured speckle image and reference speckle image information that is associated with and unique to the reference region, and controls the motion driving module to drive the working stage toward a target position in the coordinate system based on a difference between the current position and the target position.

    摘要翻译: 驱动装置包括刚性地联接到平台的运动驱动模块,由运动驱动模块驱动以相对于平台移动的工作台,刚性地耦合到工作台的散斑图像捕获模块,并能够捕获 所述平台的参考区域的子区域和可以定位模式操作的控制模块,其中所述控制模块基于所捕获的散斑图像之间的比较来获得与所述平台相关联的坐标系中的所述工作台的当前位置 以及参考斑点图像信息,其与参考区域相关联并且是唯一的,并且基于当前位置和目标位置之间的差异来控制运动驱动模块朝向坐标系中的目标位置驱动工作台。