- 专利标题: METHOD OF FABRICATING ERASABLE PROGRAMMABLE SINGLE-PLOY NONVOLATILE MEMORY
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申请号: US13602404申请日: 2012-09-04
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公开(公告)号: US20130237048A1公开(公告)日: 2013-09-12
- 发明人: Te-Hsun Hsu , Hsin-Ming Chen , Wen-Hao Ching , Wei-Ren Chen
- 申请人: Te-Hsun Hsu , Hsin-Ming Chen , Wen-Hao Ching , Wei-Ren Chen
- 申请人地址: TW Hsin-Chu
- 专利权人: eMemory Technology Inc.
- 当前专利权人: eMemory Technology Inc.
- 当前专利权人地址: TW Hsin-Chu
- 主分类号: H01L21/28
- IPC分类号: H01L21/28
摘要:
The present invention provides method of fabricating an erasable programmable single-poly nonvolatile memory, comprising steps of: defining a first area and a second area in a first type substrate; forming a second type well region in the first area; forming a first gate oxide layer and a second gate oxide layer covered on a surface of the first area, wherein the second gate oxide layer is extended to and is adjacent to the second area; forming a DDD region in the second area; etching a portion of the second gate oxide layer above the second area; forming two polysilicon gates covered on the first and the second gate oxide layers; and defining a second type doped region in the DDD region and a first type doped regions in the second type well region.
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