Invention Application
- Patent Title: Laser with Integrated Multi Line or Scanning Beam Capability
- Patent Title (中): 具有集成多线或扫描光束能力的激光
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Application No.: US13845587Application Date: 2013-03-18
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Publication No.: US20130250385A1Publication Date: 2013-09-26
- Inventor: Christian Wolters , Jijen Vazhaeparambil , Dirk Woll , Anatoly Romanovsky , Bret Whiteside , Stephen Biellak , Guoheng Zhao
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: G02B27/10
- IPC: G02B27/10 ; G02B26/10 ; G02F1/35 ; G02F1/01
Abstract:
A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.
Public/Granted literature
- US09678350B2 Laser with integrated multi line or scanning beam capability Public/Granted day:2017-06-13
Information query
