公开(公告)号：US20140268118A1

公开(公告)日：2014-09-18

申请号：US13834662

申请日：2013-03-15

Applicant: KLA-TENCOR CORPORATION

Inventor： Zhiwei Xu ,  Christian Wolters ,  Juergen Reich ,  Bret Whiteside ,  Guoheng Zhao ,  Jijen Vazhaeparambil ,  Stephen Biellak ,  Sam Shamouilian ,  Mehdi Vaez-Iravani

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/956

Abstract: The disclosure is directed to a system and method for inspecting a spinning sample by substantially simultaneously scanning multiple spots on a surface of the sample utilizing a plurality of illumination beams. Portions of illumination reflected, scattered, or radiated from respective spots on the surface of the sample are collected by at least one detector array. Information associated with at least one defect of the sample is determined by at least one computing system in communication with the detector array. According to various embodiments, at least one of scan pitch, spot size, spot separation, and spin rate is controlled to compensate pitch error due to tangential spot separation.

Abstract translation: 本公开涉及一种用于通过基本上同时使用多个照明光束扫描样品表面上的多个点来检查纺丝样品的系统和方法。 通过至少一个检测器阵列收集从样品表面上的各个点反射，散射或辐射的照射部分。 与样品的至少一个缺陷相关联的信息由与检测器阵列通信的至少一个计算系统确定。 根据各种实施例，控制扫描间距，光斑尺寸，光点分离和旋转速率中的至少一个以补偿由于切点分离引起的俯仰误差。

公开(公告)号：US09182358B2

公开(公告)日：2015-11-10

申请号：US13834662

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Zhiwei Xu ,  Christian Wolters ,  Juergen Reich ,  Bret Whiteside ,  Guoheng Zhao ,  Jijen Vazhaeparambil ,  Stephen Biellak ,  Sam Shamouilian ,  Mehdi Vaez-Iravani

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/956

Abstract: The disclosure is directed to a system and method for inspecting a spinning sample by substantially simultaneously scanning multiple spots on a surface of the sample utilizing a plurality of illumination beams. Portions of illumination reflected, scattered, or radiated from respective spots on the surface of the sample are collected by at least one detector array. Information associated with at least one defect of the sample is determined by at least one computing system in communication with the detector array. According to various embodiments, at least one of scan pitch, spot size, spot separation, and spin rate is controlled to compensate pitch error due to tangential spot separation.

Abstract translation: 本公开涉及一种用于通过基本上同时使用多个照明光束扫描样品表面上的多个点来检查纺丝样品的系统和方法。 通过至少一个检测器阵列收集从样品表面上的各个点反射，散射或辐射的照射部分。 与样品的至少一个缺陷相关联的信息由与检测器阵列通信的至少一个计算系统确定。 根据各种实施例，控制扫描间距，光斑尺寸，光点分离和旋转速率中的至少一个以补偿由于切点分离引起的俯仰误差。

公开(公告)号：US09891177B2

公开(公告)日：2018-02-13

申请号：US14506321

申请日：2014-10-03

Applicant: KLA-Tencor Corporation

Inventor： Jijen Vazhaeparambil ,  Guoheng Zhao ,  Daniel Kavaldjiev ,  Anatoly Romanovsky ,  Ivan Maleev ,  Christian Wolters ,  Stephen Biellak ,  Bret Whiteside ,  Donald Pettibone ,  Yung-Ho Alex Chuang ,  David W. Shortt

IPC: G01N21/88 ,  G01N21/95 ,  G06T7/00 ,  G01N21/956

CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/06113 ,  G01N2201/103 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.

公开(公告)号：US09678350B2

公开(公告)日：2017-06-13

申请号：US13845587

申请日：2013-03-18

Applicant: KLA-Tencor Corporation

Inventor： Christian Wolters ,  Jijen Vazhaeparambil ,  Dirk Woll ,  Anatoly Romanovsky ,  Bret Whiteside ,  Stephen Biellak ,  Guoheng Zhao

IPC: G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  G02B27/10 ,  G02F1/01 ,  G03F7/20 ,  G02F1/35 ,  H01S3/00

CPC classification number: G02B27/1006 ,  G02B26/10 ,  G02B26/106 ,  G02F1/0105 ,  G02F1/353 ,  G03F7/7065 ,  H01S3/0071 ,  H01S3/0092

Abstract: A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.

公开(公告)号：US20160097727A1

公开(公告)日：2016-04-07

申请号：US14506321

申请日：2014-10-03

Applicant: KLA-Tencor Corporation

Inventor： Jijen Vazhaeparambil ,  Guoheng Zhao ,  Daniel Kavaldjiev ,  Anatoly Romanovsky ,  Ivan Maleev ,  Christian Wolters ,  Stephen Biellak ,  Bret Whiteside ,  Donald Pettibone ,  Yung-Ho Alex Chuang ,  David W. Shortt

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95

CPC classification number: G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/06113 ,  G01N2201/103 ,  G01N2201/12 ,  G06T7/0004 ,  G06T2207/10004 ,  G06T2207/30148

Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.

Abstract translation: 晶片扫描系统包括成像采集光学器件以减少有效光斑尺寸。 较小的斑点尺寸使得表面散射的光子数量与斑点的面积成比例地减小。 空气散射也减少。 TDI用于基于在晶片的线性运动方向上积分的多个图像信号产生晶片图像。 照明系统用光淹没晶片，创建光斑的任务被分配给成像采集光学元件。

公开(公告)号：US20130250385A1

公开(公告)日：2013-09-26

申请号：US13845587

申请日：2013-03-18

Applicant: KLA-TENCOR CORPORATION

Inventor： Christian Wolters ,  Jijen Vazhaeparambil ,  Dirk Woll ,  Anatoly Romanovsky ,  Bret Whiteside ,  Stephen Biellak ,  Guoheng Zhao

IPC: G02B27/10 ,  G02B26/10 ,  G02F1/35 ,  G02F1/01

CPC classification number: G02B27/1006 ,  G02B26/10 ,  G02B26/106 ,  G02F1/0105 ,  G02F1/353 ,  G03F7/7065 ,  H01S3/0071 ,  H01S3/0092

Abstract: A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.

Abstract translation: 公开了一种用于提供照明的方法和系统。 该方法可以包括提供具有预定波长的激光; 在频率转换之前进行光束分割或光束扫描中的至少一个; 转换以下至少一个的每个输出光束的频率：分束或光束扫描; 并提供用于照明的频率转换输出光束。