发明申请
US20130255782A1 SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZONE GAS FEEDS
有权
使用多区气体饲料的等离子体加工室中的共用气体面板
- 专利标题： SHARED GAS PANELS IN PLASMA PROCESSING CHAMBERS EMPLOYING MULTI-ZONE GAS FEEDS
- 专利标题（中）： 使用多区气体饲料的等离子体加工室中的共用气体面板
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申请号： US13549344申请日： 2012-07-13
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公开(公告)号： US20130255782A1公开(公告)日： 2013-10-03
- 发明人: Iqbal Shareef , Piyush Agarwal , Evangelos Spyropoulos , Mark Taskar
- 申请人： Iqbal Shareef , Piyush Agarwal , Evangelos Spyropoulos , Mark Taskar
- 主分类号： F17D1/00
- IPC分类号： F17D1/00
摘要：
Apparatus and methods for sharing a gas panel among a plurality of multi-zone gas feed chambers of a plasma processing chamber. Each multi-zone gas feed chamber is provided with its own multi-zone gas feed device to adjustably split the incoming gas flow into each chamber and provide the different gas flows to different zones of the multi-zone gas feed chamber.
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