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    METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESSING SYSTEM
    4.
    发明申请
    METHODS AND APPARATUS FOR SUPPLYING PROCESS GAS IN A PLASMA PROCESSING SYSTEM 有权
    在等离子体处理系统中提供工艺气体的方法和装置

    公开(公告)号：US20130255883A1

    公开(公告)日：2013-10-03

    申请号：US13431950

    申请日：2012-03-27

    申请人： Iqbal A. Shareef ,  Evangelos Spyropoulos ,  Mark Taskar

    发明人： Iqbal A. Shareef ,  Evangelos Spyropoulos ,  Mark Taskar

    IPC分类号： F16L55/04 ,  B05C11/00

    CPC分类号： H01J37/3244 ,  C23C16/455 ,  C23C16/52 ,  H01J37/32899

    摘要： Methods and apparatus for supplying gas in a plasma processing system that employs the single line drop approach wherein a regulator is shared among multiple mass flow controllers. In one or more embodiments, an accumulator is provided and coupled in gaseous communication with a shared manifold to reduce pressure spikes and dips. A filter, which may be replaceable or non-replaceable separate from the accumulator, is integrated with the accumulator in one or more embodiments.

    摘要翻译： 在采用单线滴落方法的等离子体处理系统中供应气体的方法和装置，其中调节器在多个质量流量控制器之间共享。 在一个或多个实施例中，提供蓄能器并且与共用歧管气体连通地联接以减少压力尖峰和下降。 在一个或多个实施例中，可以与蓄能器分离的可替代或不可更换的过滤器与蓄能器集成。

    System and method for decreasing scrubber exhaust from gas delivery panels
    5.
    发明授权
    System and method for decreasing scrubber exhaust from gas delivery panels 有权
    从气体输送板减少洗涤器排气的系统和方法

    公开(公告)号：US09175808B2

    公开(公告)日：2015-11-03

    申请号：US13220890

    申请日：2011-08-30

    申请人： Mark Taskar ,  Iqbal Shareef

    发明人： Mark Taskar ,  Iqbal Shareef

    IPC分类号： B60B15/04 ,  F17D1/00 ,  B08B15/00 ,  B08B15/04

    CPC分类号： F17D1/00 ,  B08B15/002 ,  B08B15/04 ,  F17C1/00 ,  F17C2221/031 ,  G01M3/22 ,  Y10T137/0318 ,  Y10T137/6851 ,  Y10T137/7736 ,  Y10T137/7761 ,  Y10T137/86107

    摘要： A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.

    摘要翻译： 提供一种方法和装置，用于减少来自气体面板的洗涤器排气，降低操作成本，通过在高潜在的点火风险区域中增加空气速度来降低便利成本和功率消耗。 该设备包括通过具有各个分散喷嘴的管道供应压缩干燥空气（CDA）。 CDA分散喷嘴可以安装在各种关键位置，以便提供额外的通风湍流并减少气体面板内的潜在死区。 本发明的方面有助于通过降低功耗来节省能源和保护环境。 另外，通过最小化潜在的点火风险，可以改善人身安全。

    SHARED GAS PANELS IN PLASMA PROCESSING SYSTEMS
    6.
    发明申请
    SHARED GAS PANELS IN PLASMA PROCESSING SYSTEMS 有权
    等离子体加工系统中的共用气体面板

    公开(公告)号：US20130255781A1

    公开(公告)日：2013-10-03

    申请号：US13431946

    申请日：2012-03-27

    申请人： Mark Taskar ,  Iqbal Shareef

    发明人： Mark Taskar ,  Iqbal Shareef

    IPC分类号： B01F5/04

    CPC分类号： B01F3/026 ,  Y10T137/0318 ,  Y10T137/87249 ,  Y10T137/87281 ,  Y10T137/87652 ,  Y10T137/87885

    摘要： Methods and apparatus for shared gas panel for supplying a process gas to a plurality of process modules are disclosed. The shared gas panel includes a plurality of mixing valves and at least two mixing manifolds for a given mixing valve to service at least two process modules. The mixing manifolds are disposed on a given plane and staggered to save space. Components of the shared gas panel are also stacked vertically in order to reduce volume of the shared gas panel enclosure. Components are optimized such that the two mixing manifolds coupled to the given mixing valve receive equal mass flow to eliminate matching issues.

    摘要翻译： 公开了用于向多个处理模块提供处理气体的共用气体面板的方法和装置。 共用气体面板包括多个混合阀和用于给定混合阀的至少两个混合歧管，以用于至少两个过程模块。 混合歧管布置在给定的平面上并交错以节省空间。 共用气体面板的组件也垂直堆叠，以减少共用气体面板外壳的体积。 优化组件使得耦合到给定混合阀的两个混合歧管获得相等的质量流量以消除匹配问题。

    Shared gas panels in plasma processing systems
    7.
    发明授权
    Shared gas panels in plasma processing systems 有权
    等离子处理系统中的共用气体面板

    公开(公告)号：US08851113B2

    公开(公告)日：2014-10-07

    申请号：US13431946

    申请日：2012-03-27

    申请人： Mark Taskar ,  Iqbal Shareef

    发明人： Mark Taskar ,  Iqbal Shareef

    IPC分类号： F16K11/20

    CPC分类号： B01F3/026 ,  Y10T137/0318 ,  Y10T137/87249 ,  Y10T137/87281 ,  Y10T137/87652 ,  Y10T137/87885

    摘要： Methods and apparatus for shared gas panel for supplying a process gas to a plurality of process modules are disclosed. The shared gas panel includes a plurality of mixing valves and at least two mixing manifolds for a given mixing valve to service at least two process modules. The mixing manifolds are disposed on a given plane and staggered to save space. Components of the shared gas panel are also stacked vertically in order to reduce volume of the shared gas panel enclosure. Components are optimized such that the two mixing manifolds coupled to the given mixing valve receive equal mass flow to eliminate matching issues.

    摘要翻译： 公开了用于向多个处理模块提供处理气体的共用气体面板的方法和装置。 共用气体面板包括多个混合阀和用于给定混合阀的至少两个混合歧管，以用于至少两个过程模块。 混合歧管布置在给定的平面上并交错以节省空间。 共用气体面板的组件也垂直堆叠，以减少共用气体面板外壳的体积。 优化组件使得耦合到给定混合阀的两个混合歧管获得相等的质量流量以消除匹配问题。

    Gas transport delay resolution for short etch recipes
    8.
    发明授权
    Gas transport delay resolution for short etch recipes 有权
    用于短蚀刻配方的气体输送延迟分辨率

    公开(公告)号：US08794267B2

    公开(公告)日：2014-08-05

    申请号：US12810756

    申请日：2008-12-17

    申请人： Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

    发明人： Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

    IPC分类号： F16K11/10

    CPC分类号： H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

    摘要： In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

    摘要翻译： 在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管，多个混合歧管出口位于 混合歧管 以及与多个混合歧管出口中的每一个流体连接的隔离装置。

    SYSTEM AND METHOD FOR DECREASING SCRUBBER EXHAUST FROM GAS DELIVERY PANELS
    9.
    发明申请
    SYSTEM AND METHOD FOR DECREASING SCRUBBER EXHAUST FROM GAS DELIVERY PANELS 有权
    从气体输送面板减少排气的系统和方法

    公开(公告)号：US20120318362A1

    公开(公告)日：2012-12-20

    申请号：US13220890

    申请日：2011-08-30

    申请人： Mark Taskar ,  Iqbal Shareef

    发明人： Mark Taskar ,  Iqbal Shareef

    IPC分类号： F15D1/00

    CPC分类号： F17D1/00 ,  B08B15/002 ,  B08B15/04 ,  F17C1/00 ,  F17C2221/031 ,  G01M3/22 ,  Y10T137/0318 ,  Y10T137/6851 ,  Y10T137/7736 ,  Y10T137/7761 ,  Y10T137/86107

    摘要： A method and apparatus is provided for decreasing the scrubber exhaust from gas panels, lower the cost of operation, lower the facilitation cost and power consumption by increasing the air velocity in areas of high potential risk of ignition. The apparatus includes a supply of compressed dry air (CDA) through the tubing with individual dispersion nozzles. The CDA dispersion nozzles can be installed at various key locations in order to provide additional ventilation turbulence and reduce potential dead zones inside the gas panel. Aspects of the invention help to save the energy and protect the environment by reducing the power consumption. In addition human safety shall be improved by minimizing the potential risk of ignition.

    摘要翻译： 提供一种方法和装置，用于减少来自气体面板的洗涤器排气，降低操作成本，通过在高潜在的点火风险区域中增加空气速度来降低便利成本和功率消耗。 该设备包括通过具有各个分散喷嘴的管道供应压缩干燥空气（CDA）。 CDA分散喷嘴可以安装在各种关键位置，以便提供额外的通风湍流并减少气体面板内的潜在死区。 本发明的方面有助于通过降低功耗来节省能源和保护环境。 另外，通过最小化潜在的点火风险，可以改善人身安全。

    GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES
    10.
    发明申请
    GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES 有权
    气体运输延迟解决方案

    公开(公告)号：US20110005601A1

    公开(公告)日：2011-01-13

    申请号：US12810756

    申请日：2008-12-17

    申请人： Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

    发明人： Iqbal Shareef ,  Mark Taskar ,  Tony Zemlock

    IPC分类号： F15D1/00

    CPC分类号： H01L21/67069 ,  H01L21/67253 ,  Y10T137/0318 ,  Y10T137/877 ,  Y10T137/87885

    摘要： In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.

    摘要翻译： 在一个实施例中，用于提供多种气体的气体混合物的设备可以具有多个质量流量控制器（MFC），与每个多个MFC流体连接的混合歧管，多个混合歧管出口位于 混合歧管 以及与多个混合歧管出口中的每一个流体连接的隔离装置。