发明申请
- 专利标题: SEMICONDUCTOR WAFERS RECRYSTALLIZED IN A PARTIALLY SURROUNDING THIN FILM CAPSULE
- 专利标题(中): 半导体晶片在部分环绕薄膜中重新形成
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申请号: US14155546申请日: 2014-01-15
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公开(公告)号: US20140124963A1公开(公告)日: 2014-05-08
- 发明人: Emanuel M Sachs , James G. Serdy , Eerik T. Hantsoo
- 申请人: Massachusetts Institute of Technology
- 申请人地址: US MA Cambridge
- 专利权人: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 当前专利权人: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
- 当前专利权人地址: US MA Cambridge
- 主分类号: C30B13/00
- IPC分类号: C30B13/00 ; H01L23/31 ; H01L29/04
摘要:
An original wafer, typically silicon, has the form of a desired end PV wafer. The original may be made by rapid solidification or CVD. It has small grains. It is encapsulated in a clean thin film, which contains and protects the silicon when recrystallized to create a larger grain structure. The capsule can be made by heating a wafer in the presence of oxygen, or steam, resulting in silicon dioxide on the outer surface, typically 1-2 microns. At least one support element supports the wafer at the time the capsule is provided and blocks only minimal surface area from contact with the film forming atmosphere. There may be a plurality of support elements, or a surface may provide such support. The capsule contains the molten material during recrystallization, and protects against impurities. Recrystallization may be in air. After recrystallization, the capsule is removed.
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