发明申请
- 专利标题: SEMICONDUCTOR DEVICES WITH ENHANCED ELECTROMIGRATION PERFORMANCE
- 专利标题(中): 具有增强电化学性能的半导体器件
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申请号: US13674498申请日: 2012-11-12
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公开(公告)号: US20140131878A1公开(公告)日: 2014-05-15
- 发明人: Jeffrey P. Gambino , David L. Harame , Baozhen Li , Timothy D. Sullivan , Bjorn K. A. Zetterlund
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/768
- IPC分类号: H01L21/768 ; H01L23/522
摘要:
Semiconductor devices with enhanced electromigration performance and methods of manufacture are disclosed. The method includes forming at least one metal line in electrical contact with a device. The method further includes forming at least one staple structure in electrical contact with the at least one metal line. The at least one staple structure is formed such that electrical current passing through the at least one metal line also passes through the at least staple structure to reduce electromigration issues.
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