发明申请
- 专利标题: Resistance Change Element and Method for Producing the Same
- 专利标题(中): 电阻变化要素及其制作方法
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申请号: US14125254申请日: 2012-06-07
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公开(公告)号: US20140166966A1公开(公告)日: 2014-06-19
- 发明人: Yutaka Nishioka , Kazumasa Horita , Natsuki Fukuda , Shin Kikuchi , Koukou Suu
- 申请人: Yutaka Nishioka , Kazumasa Horita , Natsuki Fukuda , Shin Kikuchi , Koukou Suu
- 申请人地址: JP Kanagawa
- 专利权人: ULVAC, INC.
- 当前专利权人: ULVAC, INC.
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2011-130011 20110610
- 国际申请: PCT/JP2012/003728 WO 20120607
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
To provide a resistance change element which does not require a forming process and enables reduction of power consumption and miniaturization of the element, and to provide a method for producing it. A resistance change element 1 according to an embodiment of the present invention includes a bottom electrode layer 3, a top electrode layer 5 and an oxide semiconductor layer 4. The oxide semiconductor layer 4 has a first metal oxide layer 41 and a second metal oxide layer 42. The first metal oxide layer 41 is formed between the bottom electrode layer 3 and the top electrode layer 5, and in ohmic contact with the bottom electrode layer 3. The second metal oxide layer 42 is formed between the first metal oxide layer 41 and the top electrode layer 5, and in ohmic contact with the top electrode layer 5.
公开/授权文献
- US09281477B2 Resistance change element and method for producing the same 公开/授权日:2016-03-08
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