Invention Application
US20140184003A1 SYSTEMS AND METHODS FOR ROTATIONAL ALIGNMENT OF A DEVICE UNDER TEST
审中-公开
用于测试装置的旋转对准的系统和方法
- Patent Title: SYSTEMS AND METHODS FOR ROTATIONAL ALIGNMENT OF A DEVICE UNDER TEST
- Patent Title (中): 用于测试装置的旋转对准的系统和方法
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Application No.: US14141749Application Date: 2013-12-27
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Publication No.: US20140184003A1Publication Date: 2014-07-03
- Inventor: Jorg Kiesewetter , Karsten Stoll
- Applicant: CASCADE MICROTECH, INC.
- Applicant Address: US OR BEAVERTON
- Assignee: CASCADE MICROTECH, INC.
- Current Assignee: CASCADE MICROTECH, INC.
- Current Assignee Address: US OR BEAVERTON
- Main IPC: H02K7/08
- IPC: H02K7/08 ; G01R1/067

Abstract:
Systems and methods for rotational alignment of a device under test are disclosed herein. These systems include a chuck that includes a rotational positioning assembly that includes a lower section and an upper section that is configured to selectively rotate relative to the lower section about a rotational axis. The rotational positioning assembly further includes a first bearing that is configured to support a radial load between the upper section and the lower section and a second bearing that is configured to support a thrust load between the upper section and the lower section. The methods include providing a fluid stream to the second bearing to permit rotation of the upper section relative to the lower section, rotating the upper section relative to the lower section, and ceasing the providing the fluid stream to the second bearing to restrict rotation of the upper section relative to the lower section.
Information query