公开(公告)号：US20140184003A1

公开(公告)日：2014-07-03

申请号：US14141749

申请日：2013-12-27

Applicant: CASCADE MICROTECH, INC.

Inventor： Jorg Kiesewetter ,  Karsten Stoll

IPC: H02K7/08 ,  G01R1/067

CPC classification number: G01R1/067 ,  G01R31/2887

Abstract: Systems and methods for rotational alignment of a device under test are disclosed herein. These systems include a chuck that includes a rotational positioning assembly that includes a lower section and an upper section that is configured to selectively rotate relative to the lower section about a rotational axis. The rotational positioning assembly further includes a first bearing that is configured to support a radial load between the upper section and the lower section and a second bearing that is configured to support a thrust load between the upper section and the lower section. The methods include providing a fluid stream to the second bearing to permit rotation of the upper section relative to the lower section, rotating the upper section relative to the lower section, and ceasing the providing the fluid stream to the second bearing to restrict rotation of the upper section relative to the lower section.

Abstract translation: 本文公开了用于被测设备的旋转对准的系统和方法。 这些系统包括卡盘，其包括旋转定位组件，该旋转定位组件包括下部部分和被配置为围绕旋转轴线相对于下部部分选择性地旋转的上部部件。 旋转定位组件还包括第一轴承，其构造成支撑在上部段和下部分之间的径向载荷;以及第二轴承，其构造成支撑上部和下部之间的推力载荷。 所述方法包括向第二轴承提供流体流以允许上部相对于下部旋转，使上部相对于下部旋转，并停止向第二轴承提供流体流以限制第二轴承的旋转 上部相对于下部。