发明申请
- 专利标题: PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH STRESS LAYER
- 专利标题(中): 预应力电容微电脑转换器电池与应力层
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申请号: US14349077申请日: 2012-10-26
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公开(公告)号: US20140251014A1公开(公告)日: 2014-09-11
- 发明人: Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
- 申请人: KONINKLIJKE PHILIPS N.V.
- 国际申请: PCT/IB2012/055919 WO 20121026
- 主分类号: G01H9/00
- IPC分类号: G01H9/00
摘要:
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
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