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1.发明申请公开(公告)号：US20140251014A1
公开(公告)日：2014-09-11
申请号：US14349077
申请日：2012-10-26
发明人： Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
IPC分类号： G01H9/00
CPC分类号： G01H9/008 , B06B1/0292 , Y10T29/49005
摘要： The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
摘要翻译： 本发明涉及一种包括基底（12）的预折叠电容微加工的换能器单元（10）和设置在总膜面积（Atotal）之上的隔膜（14），其中，腔 所述膜（14）和所述基板（12），所述膜包括孔（15）和围绕所述孔（15）的边缘部分（14a）。 电池（10）还包括膜（14）上的应力层（17），应力层（17）相对于膜（14）具有预定的应力值，应力层（17）适于提供 在所述膜（14）上朝向所述基板（12）的方向上的弯曲力矩使得所述膜（14）的边缘部分（14a）折叠到所述基板（12）。 本发明还涉及一种制造这种预塌缩的电容微加工的换能器单元（10）的方法。
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2.发明授权公开(公告)号：US09534949B2
公开(公告)日：2017-01-03
申请号：US14349077
申请日：2012-10-26
发明人： Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
CPC分类号： G01H9/008 , B06B1/0292 , Y10T29/49005
摘要： The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
摘要翻译： 本发明涉及一种包括基底（12）的预折叠电容微加工的换能器单元（10）和设置在总膜面积（Atotal）之上的隔膜（14），其中，腔 所述膜（14）和所述基板（12），所述膜包括孔（15）和围绕所述孔（15）的边缘部分（14a）。 电池（10）还包括膜（14）上的应力层（17），应力层（17）相对于膜（14）具有预定的应力值，应力层（17）适于提供 在所述膜（14）上朝向所述基板（12）的方向上的弯曲力矩使得所述膜（14）的边缘部分（14a）折叠到所述基板（12）。 本发明还涉及一种制造这种预塌缩的电容微加工的换能器单元（10）的方法。
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公开(公告)号：US09117438B2
公开(公告)日：2015-08-25
申请号：US14349079
申请日：2012-10-15
发明人： Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
CPC分类号： G10K11/18 , B06B1/0292 , H04R31/00 , Y10T29/49005
摘要： The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
摘要翻译： 本发明涉及一种包括基底（12）的预折叠电容微加工换能器单元（10），以及设置在总膜面积（（Atotal））之上的膜（14），其中形成空腔 在膜（14）和基板（12）之间，膜（14）包括孔（15）和围绕孔（15）的边缘部分（14a），膜（14）的边缘部分（14a） 所述电池还包括布置在所述膜（14）的孔（15）中的插塞（30），所述插塞（30）仅位于所述膜（14）的子区域（Asub）中， 区域（Atotal）。本发明还涉及一种制造这种预塌缩的电容微加工的换能器单元（10）的方法。
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公开(公告)号：US20140247698A1
公开(公告)日：2014-09-04
申请号：US14349079
申请日：2012-10-15
发明人： Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
CPC分类号： G10K11/18 , B06B1/0292 , H04R31/00 , Y10T29/49005
摘要： The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
摘要翻译： 本发明涉及一种包括基底（12）的预折叠电容微加工换能器单元（10），以及设置在总膜面积（（Atotal））之上的膜（14），其中形成空腔（20） 在膜（14）和基板（12）之间，膜（14）包括孔（15）和围绕孔（15）的边缘部分（14a），膜（14）的边缘部分（14a） 所述电池还包括布置在所述膜（14）的孔（15）中的插塞（30），所述插塞（30）仅位于所述膜（14）的子区域（Asub）中， 区域（Atotal）。本发明还涉及一种制造这种预塌缩的电容微加工的换能器单元（10）的方法。
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公开(公告)号：US10293375B2
公开(公告)日：2019-05-21
申请号：US15021962
申请日：2014-09-15
摘要： Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.
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