Invention Application
US20140264465A1 CHEMICAL SENSORS WITH PARTIALLY EXTENDED SENSOR SURFACES 审中-公开
具有部分扩展传感器表面的化学传感器

CHEMICAL SENSORS WITH PARTIALLY EXTENDED SENSOR SURFACES
Abstract:
In one implementation, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive element is on a sidewall of the opening and spaced away from an upper surface of the dielectric material, the conductive element communicating with the floating gate conductor.
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