Invention Application
US20140294551A1 SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
审中-公开
使用机械开关机构的多个可移动臂的基板运输装置
- Patent Title: SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM
- Patent Title (中): 使用机械开关机构的多个可移动臂的基板运输装置
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Application No.: US14305715Application Date: 2014-06-16
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Publication No.: US20140294551A1Publication Date: 2014-10-02
- Inventor: Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
- Applicant: Brooks Automation, Inc.
- Main IPC: B25J11/00
- IPC: B25J11/00 ; B25J18/00
Abstract:
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
Public/Granted literature
- US10335945B2 Substrate transport appartatus with multiple movable arms utilizing a mechanical switch mechanism Public/Granted day:2019-07-02
Information query
