公开(公告)号：US11801598B2

公开(公告)日：2023-10-31

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J11/00 ,  B25J18/00 ,  B25J9/12

CPC classification number: B25J9/106 ,  B25J9/126 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US11613002B2

公开(公告)日：2023-03-28

申请号：US16990775

申请日：2020-08-11

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Alexander G. Krupyshev ,  Martin R. Elliot ,  Christopher Hofmeister

IPC: B25J9/04

Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

公开(公告)号：US20200001453A1

公开(公告)日：2020-01-02

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J9/12

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20140294551A1

公开(公告)日：2014-10-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J11/00 ,  B25J18/00

CPC classification number: B25J11/0095 ,  B25J9/106 ,  B25J9/126 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

Abstract translation: 一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关 耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回 组态。

公开(公告)号：US10418261B2

公开(公告)日：2019-09-17

申请号：US15137722

申请日：2016-04-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander G. Krupyshev ,  John Underwood

IPC: H01L21/677 ,  H01L21/67

Abstract: A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.

公开(公告)号：US10335945B2

公开(公告)日：2019-07-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/04 ,  B25J9/10 ,  B25J9/12 ,  H01L21/677 ,  H01L21/687 ,  B25J11/00

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20160314993A1

公开(公告)日：2016-10-27

申请号：US15137722

申请日：2016-04-25

Applicant: Brooks Automation, Inc.

Inventor： Alexander G. Krupyshev ,  John Underwood

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201

Abstract: A workpiece handling module including a first housing member and a second housing member pivotally movable relative to the first member forming a housing having an access side and a second side opposite the access side and side walls, a first portion of the side walls is carried by the first member and a second portion of the side walls is carried by the second member, and at least one of the first and second housing members includes at least one sealable opening for allowing ingress and egress of workpieces to and from an interior chamber formed by the first and second housing members in a closed configuration, and the second portion of the side walls adjacent the access side and carried by the second member is greater than the first portion of the side walls adjacent the access side and carried by the first member.

Abstract translation: 一种工件处理模块，包括第一壳体构件和第二壳体构件，所述第二壳体构件可相对于第一构件枢转运动，所述第一构件形成具有入口侧的壳体和与入口侧和侧壁相对的第二侧，侧壁的第一部分由 所述第一构件和所述侧壁的第二部分由所述第二构件承载，并且所述第一和第二壳体构件中的至少一个包括至少一个可密封的开口，用于允许工件进入和离开由内部腔室形成的内部腔室 所述第一和第二壳体构件处于闭合构型，并且邻近所述进入侧并由所述第二构件承载的所述侧壁的第二部分大于邻近所述进入侧并由所述第一构件承载的所述侧壁的第一部分。

公开(公告)号：US10737381B2

公开(公告)日：2020-08-11

申请号：US15489449

申请日：2017-04-17

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Alexander G. Krupyshev ,  Martin R. Elliot ,  Christopher Hofmeister

IPC: B25J9/04

Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.