公开(公告)号：US10335945B2

公开(公告)日：2019-07-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/04 ,  B25J9/10 ,  B25J9/12 ,  H01L21/677 ,  H01L21/687 ,  B25J11/00

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20200001453A1

公开(公告)日：2020-01-02

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J9/12

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20140294551A1

公开(公告)日：2014-10-02

申请号：US14305715

申请日：2014-06-16

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J11/00 ,  B25J18/00

CPC classification number: B25J11/0095 ,  B25J9/106 ,  B25J9/126 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/141 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

Abstract translation: 一种基板输送装置，包括框架，连接到框架并且包括至少一个可独立控制的马达的驱动部分，连接到框架的至少两个基板输送臂，并且包括布置成用于支撑和输送基板的臂连杆，以及机械运动开关 耦合到所述至少一个可独立控制的电动机和所述至少两个衬底传送臂，用于实现所述至少两个衬底传送臂中的一个的延伸和缩回，同时所述至少两个衬底传送臂中的另一个保持基本上缩回 组态。

公开(公告)号：US20140202921A1

公开(公告)日：2014-07-24

申请号：US14161039

申请日：2014-01-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  Robert T. Caveney ,  Robert C. May ,  Krysztof A. Majczak

IPC: H01L21/673 ,  H01L21/677

CPC classification number: H01L21/67775 ,  H01L21/67201 ,  H01L21/67376

Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.

Abstract translation: 基板输送系统包括：承载体，其具有形成内部环境的壳体，该内部环境具有用于保持至少一个基板的开口和用于从外部气氛密封开口的门，当密封时，内部环境被配置为保持内部空气， 壳体包括在内部环境外部的流体储存器，并且构造成容纳流体，在流体储存器中形成与内部气氛不同的气氛，以形成将内部环境与载体外部的环境密封的流体隔离密封件。

公开(公告)号：US11801598B2

公开(公告)日：2023-10-31

申请号：US16460676

申请日：2019-07-02

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Alexander G. Krupyshev ,  Krysztof A. Majczak ,  Martin Hosek ,  Jay Krishnasamy

IPC: B25J9/10 ,  H01L21/677 ,  B25J11/00 ,  B25J18/00 ,  B25J9/12

CPC classification number: B25J9/106 ,  B25J9/126 ,  B25J11/0095 ,  B25J18/00 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/21 ,  Y10S901/23 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20317 ,  Y10T74/20329

Abstract: A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.

公开(公告)号：US20200161153A1

公开(公告)日：2020-05-21

申请号：US16552881

申请日：2019-08-27

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  Robert T. Caveney ,  Robert C. May ,  Krysztof A. Majczak

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.

公开(公告)号：US10395959B2

公开(公告)日：2019-08-27

申请号：US14161039

申请日：2014-01-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  Robert T. Caveney ,  Robert C. May ,  Krysztof A. Majczak

IPC: H01L21/677 ,  H01L21/673 ,  H01L21/67

Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.