Invention Application
- Patent Title: LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE DEFECTS OF THE SAME
- Patent Title (中): 图像投影目标和校正其图像缺陷的方法
-
Application No.: US14315577Application Date: 2014-06-26
-
Publication No.: US20140327891A1Publication Date: 2014-11-06
- Inventor: Ulrich Loering , Vladan Blahnik , Wilhelm Ulrich , Daniel Kraehmer , Norbert Wabra
- Applicant: Carl Zeiss SMT GmbH
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A lithography projection objective for imaging a pattern in an object plane onto a substrate in an image plane. The projection objective comprises a multiplicity of optical elements along an optical axis. The optical elements comprise a first group of optical elements following the object plane, and a last optical element, following the first group and next to the image plane. The projection objective is tunable or tuned with respect to aberrations for the case that the volume between the last optical element and the image plane is filled by an immersion medium with a refractive index substantially greater than 1. The position of the last optical element is adjustable in the direction of the optical axis. A positioning device is provided that positions at least the last optical element during immersion operation such that aberrations induced by disturbance are at least partially compensated.
Public/Granted literature
- US09316922B2 Lithography projection objective, and a method for correcting image defects of the same Public/Granted day:2016-04-19
Information query
IPC分类: