公开(公告)号：US20190072861A1

公开(公告)日：2019-03-07

申请号：US15966591

申请日：2018-04-30

申请人： Carl Zeiss SMT GmbH

发明人： Ulrich Loering ,  Vladan Blahnik ,  Wilhelm Ulrich ,  Daniel Kraehmer ,  Norbert Wabra

IPC分类号： G03F7/20

摘要： A system includes a microlithography projection objective configured to image radiation from an object plane to an image plane along a radiation path. The microlithography projection objective has an optical axis. The microlithography projection objective includes a plurality of optical elements along the optical axis of the projection objective. The plurality of optical elements includes an optical element. During use of the system, a liquid is present. The system is configured so that, during use of the system, a distance between the optical element and the image plane is varied to reduce at least one aberration induced by a change in a temperature in the system.

公开(公告)号：US20160370709A1

公开(公告)日：2016-12-22

申请号：US15099172

申请日：2016-04-14

申请人： Carl Zeiss SMT GmbH

发明人： Ulrich Loering ,  Vladan Blahnik ,  Wilhelm Ulrich ,  Daniel Kraehmer ,  Norbert Wabra

IPC分类号： G03F7/20

CPC分类号： G03F7/70341 ,  G03F7/7015

摘要： A lithography projection objective for imaging a pattern in an object plane onto a substrate in an image plane. The projection objective comprises a multiplicity of optical elements along an optical axis. The optical elements comprise a first group of optical elements following the object plane, and a last optical element, following the first group and next to the image plane. The projection objective is tunable or tuned with respect to aberrations for the case that the volume between the last optical element and the image plane is filled by an immersion medium with a refractive index substantially greater than 1. The position of the last optical element is adjustable in the direction of the optical axis. A positioning device is provided that positions at least the last optical element during immersion operation such that aberrations induced by disturbance are at least partially compensated.

摘要翻译： 一种用于将物平面中的图案成像到图像平面中的基板上的光刻投影物镜。 投影物镜包括沿着光轴的多个光学元件。 光学元件包括跟随物平面的第一组光学元件和最后一个光学元件，跟随第一组并且靠近图像平面。 投影物镜相对于像差是可调谐的或调谐的，在最后的光学元件和像面之间的体积由折射率基本上大于1的浸没介质填充的情况下。最后一个光学元件的位置是可调节的 沿光轴的方向。 提供了一种定位装置，其在浸入操作期间至少定位最后一个光学元件，使得由干扰引起的像差至少部分地被补偿。

公开(公告)号：US20150205084A1

公开(公告)日：2015-07-23

申请号：US14672497

申请日：2015-03-30

申请人： Carl Zeiss SMT GmbH

发明人： Aurelian Dodoc ,  Wilhelm Ulrich ,  Alexander Epple

IPC分类号： G02B17/08

CPC分类号： G03F7/70058 ,  G02B17/06 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0892 ,  G03F7/7015 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.

摘要翻译： 反射折射投射物镜具有第一物镜部分，限定光轴的第一部分并对物场进行成像以形成第一实际中间像。 它还具有使用来自第一目标部分的辐射形成第二实际中间图像的第二反射折射物镜部分。 第二目标部分具有凹面镜并且限定光轴的第二部分。 第三目标部分将第二实际中间图像成像到图像平面中并且限定光轴的第三部分。 折叠镜将物体平面上的辐射偏转到凹面镜; 并将来自凹面镜的辐射偏转到图像平面。 由第一目标部分限定的光轴的第一部分与光轴的第三部分横向偏移并与其平行。

公开(公告)号：US20140111787A1

公开(公告)日：2014-04-24

申请号：US14143060

申请日：2013-12-30

申请人： Carl Zeiss SMT GmbH

发明人： David R. Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf M. von Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

IPC分类号： G02B17/08

CPC分类号： G02B17/0816 ,  G02B13/16 ,  G02B13/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G02B21/02 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1

摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的折反射投射物镜具有用于将设置在物平面中的图案成像为第一中间图像的第一折射目标部分; 第二目标部分，包括用于将第一中间成像成像成第二中间图像的至少一个凹面镜; 以及第三折射物镜部分，用于将所述第二中间成像成像到所述图像平面上; 其中所述投影物镜具有最大透镜直径Dmax，最大像场高度Y'和像侧数值孔径NA; 其中COMP1 = Dmax /（Y'·NA2），并且其中条件COMP1 <10成立。

公开(公告)号：US20140111786A1

公开(公告)日：2014-04-24

申请号：US14143004

申请日：2013-12-30

申请人： Carl Zeiss SMT GmbH

发明人： Aurelian Dodoc ,  Wilhelm Ulrich ,  Alexander Epple

IPC分类号： G02B17/08

CPC分类号： G03F7/70058 ,  G02B17/06 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0892 ,  G03F7/7015 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.

公开(公告)号：US20140078483A1

公开(公告)日：2014-03-20

申请号：US14079026

申请日：2013-11-13

申请人： Carl Zeiss SMT GmbH

发明人： Aurelian Dodoc ,  Wilhelm Ulrich ,  Alexander Epple

IPC分类号： G03F7/20 ,  G02B17/08

CPC分类号： G03F7/70058 ,  G02B17/06 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0892 ,  G03F7/7015 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.

公开(公告)号：US09726979B2

公开(公告)日：2017-08-08

申请号：US14672497

申请日：2015-03-30

申请人： Carl Zeiss SMT GmbH

发明人： Aurelian Dodoc ,  Wilhelm Ulrich ,  Alexander Epple

IPC分类号： G02B17/00 ,  G03F7/20 ,  G02B17/06 ,  G02B17/08

CPC分类号： G03F7/70058 ,  G02B17/06 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0892 ,  G03F7/7015 ,  G03F7/70225 ,  G03F7/70275

摘要： A catadioptric projection objective has a first objective part, defining a first part of the optical axis and imaging an object field to form a first real intermediate image. It also has a second, catadioptric objective part forming a second real intermediate image using the radiation from the first objective part. The second objective part has a concave mirror and defines a second part of the optical axis. A third objective part images the second real intermediate image into the image plane and defines a third part of the optical axis. Folding mirrors deflect the radiation from the object plane towards the concave mirror; and deflect the radiation from the concave mirror towards the image plane. The first part of the optical axis defined by the first objective part is laterally offset from and aligned parallel with the third part of the optical axis.

公开(公告)号：US20150055214A1

公开(公告)日：2015-02-26

申请号：US14529592

申请日：2014-10-31

申请人： Carl Zeiss SMT GmbH

发明人： David R. Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Murai Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

IPC分类号： G02B17/08 ,  G03F7/20

CPC分类号： G02B17/0816 ,  G02B13/16 ,  G02B13/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G02B21/02 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1

摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的折反射投射物镜具有用于将设置在物平面中的图案成像为第一中间图像的第一折射目标部分; 第二目标部分，包括用于将第一中间成像成像成第二中间图像的至少一个凹面镜; 以及第三折射物镜部分，用于将所述第二中间成像成像到所述图像平面上; 其中所述投影物镜具有最大透镜直径Dmax，最大像场高度Y'和像侧数值孔径NA; 其中COMP1 = Dmax /（Y'·NA2），并且其中条件COMP1 <10成立。

公开(公告)号：US20150049319A1

公开(公告)日：2015-02-19

申请号：US14496367

申请日：2014-09-25

申请人： Carl Zeiss SMT GmbH

发明人： Hans-Juergen Mann ,  Wilhelm Ulrich

IPC分类号： G03F7/20 ,  G02B17/08

CPC分类号： G03F7/702 ,  G02B17/08 ,  G03F1/62 ,  G03F7/70058 ,  G03F7/70233

摘要： A microlithography projection optical system is disclosed. The system can include a plurality of optical elements arranged to image radiation having a wavelength λ from an object field in an object plane to an image field in an image plane. The plurality of optical elements can have an entrance pupil located more than 2.8 m from the object plane. A path of radiation through the optical system can be characterized by chief rays having an angle of 3° or more with respect to the normal to the object plane. This can allow the use of face shifting masks as objects to be imaged, in particular for EUV wavelengths.

摘要翻译： 公开了一种微光刻投影光学系统。 该系统可以包括多个光学元件，其被布置成将来自物体平面中的物体场的具有波长λ的辐射成像到图像平面中的图像场。 多个光学元件可以具有距离物面大于2.8μm的入射光瞳。 通过光学系统的辐射路径的特征在于主要光线相对于物平面的法线具有3°或更大的角度。 这可以允许使用面部移动掩模作为要成像的对象，特别是对于EUV波长。

公开(公告)号：US08908269B2

公开(公告)日：2014-12-09

申请号：US14143060

申请日：2013-12-30

申请人： Carl Zeiss SMT GmbH

发明人： David R. Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf M. von Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

IPC分类号： G02B17/08 ,  G03F7/20 ,  G02B21/02 ,  G02B21/33 ,  G02B13/22

CPC分类号： G02B17/0816 ,  G02B13/16 ,  G02B13/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G02B21/02 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1

摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的折反射投射物镜具有用于将设置在物平面中的图案成像为第一中间图像的第一折射目标部分; 第二目标部分，包括用于将第一中间成像成像成第二中间图像的至少一个凹面镜; 以及第三折射物镜部分，用于将所述第二中间成像成像到所述图像平面上; 其中所述投影物镜具有最大透镜直径Dmax，最大像场高度Y'和像侧数值孔径NA; 其中COMP1 = Dmax /（Y'·NA2），并且其中条件COMP1 <10成立。