发明申请
- 专利标题: PROBE CARD PARTITION SCHEME
- 专利标题(中): 探针卡分割方案
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申请号: US14459801申请日: 2014-08-14
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公开(公告)号: US20140354322A1公开(公告)日: 2014-12-04
- 发明人: Sandeep Kumar GOEL , Mill-Jer WANG
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R1/073 ; G01R1/04
摘要:
A method of testing an integrated circuit die comprises partitioning a first probe card partition layout of the integrated circuit die having one or more sections comprising a first quantity of section types into a second probe card partition layout having a greater quantity of sections comprising a second quantity of section types, the second quantity of section types being less than the first quantity of section types. The method also comprises using one or more probe cards to test the sections in the second probe card partition layout, each of the one or more probe cards having a test contact pattern that corresponds with a test contact pattern of one of each section type included in the second probe card partition layout.
公开/授权文献
- US09513332B2 Probe card partition scheme 公开/授权日:2016-12-06
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