Invention Application
US20150014579A1 POLISHING COMPOSITION AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE
审中-公开
抛光组合物和生产半导体基材的方法
- Patent Title: POLISHING COMPOSITION AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE
- Patent Title (中): 抛光组合物和生产半导体基材的方法
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Application No.: US14376547Application Date: 2013-02-05
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Publication No.: US20150014579A1Publication Date: 2015-01-15
- Inventor: Toshihiro Miwa , Hiroyuki Oda , Shinichiro Takami , Shuhei Takahashi , Yutaka Inoue
- Applicant: FUJIMI INCORPORATED
- Priority: JP2012-027495 20120210
- International Application: PCT/JP2013/052585 WO 20130205
- Main IPC: H01L21/304
- IPC: H01L21/304 ; B24B37/04 ; C09G1/02

Abstract:
A polishing composition contains: silicon dioxide having an average primary particle diameter of 40 nm or more as calculated from the specific surface area determined by the BET method; a nitrogen-containing water-soluble polymer; and a basic compound. The value of B/A is 1 or more and less than 7,000 and the value of C/A is 5,000 or more and less than 1,500,000 when in one liter of the polishing composition, A is defined as the number of silicon dioxide, B is defined as the number of monomer units of the nitrogen-containing water-soluble polymer, and C is defined as the number of molecules of the basic compound. Alternatively, the value of B/A is 1 or more and less than 7,000 and the value of C/A is 5,000 or more and less than 100,000. The polishing composition is used, for example, for polishing a semiconductor substrate.
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