Invention Application
- Patent Title: SELF-ALIGNED TUNABLE METAMATERIALS
- Patent Title (中): 自对准可调元件
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Application No.: US14380987Application Date: 2013-03-11
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Publication No.: US20150017466A1Publication Date: 2015-01-15
- Inventor: Arturo A. Ayon , Ramakrishna Kotha , Diana Strickland
- Applicant: Arturo A. Ayon , Ramakrishna Kotha , Diana Strickland
- International Application: PCT/US2013/030268 WO 20130311
- Main IPC: C30B19/12
- IPC: C30B19/12 ; C30B23/02 ; C30B19/06 ; C30B30/02 ; C30B29/66 ; C30B29/68 ; C30B29/58 ; C30B29/52 ; C30B19/10 ; C30B23/08

Abstract:
A self-aligned tunable metamaterial is formed as a wire mesh. Self-aligned channel grids are formed in layers in a silicon substrate using deep trench formation and a high-temperature anneal. Vertical wells at the channels may also be etched. This may result in a three-dimensional mesh grid of metal and other material. In another embodiment, metallic beads are deposited at each intersection of the mesh grid, the grid is encased in a rigid medium, and the mesh grid is removed to form an artificial nanocrystal.
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