发明申请
US20150055205A1 MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS 审中-公开
MEMS显示器扩大高度执行器

MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS
摘要:
This disclosure provides systems, methods, and apparatus for a MEMS display incorporating extended height actuators. A light modulating component can be positioned between a substrate and an opposing surface coupled to the substrate. A suspended electrode can be coupled to the light modulating component and suspended between the substrate and the opposing surface. An extended-height electrode can be positioned immediately adjacent to the suspended electrode, and can extend from the substrate up to a height beyond the height of the suspended electrode. The suspended electrode and the extended-height electrode can be configured to move the light modulating component laterally with respect to the substrate.
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