发明申请
- 专利标题: MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS
- 专利标题(中): MEMS显示器扩大高度执行器
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申请号: US13973852申请日: 2013-08-22
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公开(公告)号: US20150055205A1公开(公告)日: 2015-02-26
- 发明人: Tyler A. Dunn , Timothy J. Brosnihan
- 申请人: Pixtronix, Inc.
- 申请人地址: US CA San Diego
- 专利权人: Pixtronix, Inc.
- 当前专利权人: Pixtronix, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: G02B26/02
- IPC分类号: G02B26/02 ; B81C1/00 ; B81B5/00
摘要:
This disclosure provides systems, methods, and apparatus for a MEMS display incorporating extended height actuators. A light modulating component can be positioned between a substrate and an opposing surface coupled to the substrate. A suspended electrode can be coupled to the light modulating component and suspended between the substrate and the opposing surface. An extended-height electrode can be positioned immediately adjacent to the suspended electrode, and can extend from the substrate up to a height beyond the height of the suspended electrode. The suspended electrode and the extended-height electrode can be configured to move the light modulating component laterally with respect to the substrate.