Invention Application
US20150123166A1 METHODS OF FORMING FINFET DEVICES WITH ALTERNATIVE CHANNEL MATERIALS
有权
用替代通道材料形成FINFET器件的方法
- Patent Title: METHODS OF FORMING FINFET DEVICES WITH ALTERNATIVE CHANNEL MATERIALS
- Patent Title (中): 用替代通道材料形成FINFET器件的方法
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Application No.: US14069955Application Date: 2013-11-01
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Publication No.: US20150123166A1Publication Date: 2015-05-07
- Inventor: Ajey Poovannummoottil Jacob , Murat Kerem Akarvardar , Michael Hargrove , Ruilong Xie
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/092 ; H01L29/66

Abstract:
are methods and devices that involve formation of alternating layers of different semiconductor materials in the channel region of FinFET devices. The methods and devices disclosed herein involve forming a doped silicon substrate fin and thereafter forming a layer of silicon/germanium around the substrate fin. The methods and devices also include forming a gate structure around the layer of silicon/germanium using gate first or gate last techniques.
Public/Granted literature
- US09312387B2 Methods of forming FinFET devices with alternative channel materials Public/Granted day:2016-04-12
Information query
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