发明申请
- 专利标题: FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND INKJET RECORDING APPARATUS
- 专利标题(中): 机电传感器膜,机电传感器元件,液体喷射头和喷墨记录装置的制造方法
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申请号: US14554568申请日: 2014-11-26
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公开(公告)号: US20150145924A1公开(公告)日: 2015-05-28
- 发明人: Akira SHIMOFUKU , Osamu Machida , Atsushi Takeuchi
- 申请人: Akira SHIMOFUKU , Osamu Machida , Atsushi Takeuchi
- 优先权: JP2013-246509 20131128
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; B41J2/14 ; H01L41/09 ; G01B11/14
摘要:
Disclosed is a method of fabricating an electromechanical transducer film. The method includes treating a surface of a first electrode to be liquid-repellent, the first electrode being formed on one surface of a substrate, irradiating the surface of the first liquid-repellent electrode with an energy ray while moving an irradiation position in accordance with a shape of the electromechanical transducer film to be formed and a shape of an alignment mark to be formed, and forming the alignment mark by applying an application liquid to an area including a portion irradiated with the energy ray in accordance with the shape of the alignment mark in the irradiating step, the application liquid being applied by an inkjet method.
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