发明申请
US20150145924A1 FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND INKJET RECORDING APPARATUS 有权
机电传感器膜,机电传感器元件,液体喷射头和喷墨记录装置的制造方法

FABRICATION METHOD OF ELECTROMECHANICAL TRANSDUCER FILM, ELECTROMECHANICAL TRANSDUCER ELEMENT, LIQUID EJECTION HEAD, AND INKJET RECORDING APPARATUS
摘要:
Disclosed is a method of fabricating an electromechanical transducer film. The method includes treating a surface of a first electrode to be liquid-repellent, the first electrode being formed on one surface of a substrate, irradiating the surface of the first liquid-repellent electrode with an energy ray while moving an irradiation position in accordance with a shape of the electromechanical transducer film to be formed and a shape of an alignment mark to be formed, and forming the alignment mark by applying an application liquid to an area including a portion irradiated with the energy ray in accordance with the shape of the alignment mark in the irradiating step, the application liquid being applied by an inkjet method.
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