Microplasma generators and associated arrays and methods are described herein. Certain embodiments relate to a microplasma generator in which an elongated semiconductor structure can control electronic cun'ent supplied to a microplasma cavity. Plasmas can be created by supplying energy to a neutral gas so that free electrons and ions are created. In a thermal plasma, electrons, ions, and neutral atoms and/or molecules (referred to as “neutrals”) are in thermal equilibrium