Invention Application
- Patent Title: Patterning Methods and Methods of Forming Electrically Conductive Lines
- Patent Title (中): 形成导电线的图案化方法和方法
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Application No.: US14699664Application Date: 2015-04-29
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Publication No.: US20150235938A1Publication Date: 2015-08-20
- Inventor: Vishal Sipani , Kyle Armstrong , Michael D. Hyatt , Michael Dean Van Patten , David A. Kewley , Ming-Chuan Yang
- Applicant: Micron Technology, Inc.
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L23/532

Abstract:
Some embodiments include methods of forming electrically conductive lines. Photoresist features are formed over a substrate, with at least one of the photoresist features having a narrowed region. The photoresist features are trimmed, which punches through the narrowed region to form a gap. Spacers are formed along sidewalls of the photoresist features. Two of the spacers merge within the gap. The photoresist features are removed to leave a pattern comprising the spacers. The pattern is extended into the substrate to form a plurality of recesses within the substrate. Electrically conductive material is formed within the recesses to create the electrically conductive lines. Some embodiments include semiconductor constructions having a plurality of lines over a semiconductor substrate. Two of the lines are adjacent to one another and are substantially parallel to one another except in a region wherein said two of the lines merge into one another.
Public/Granted literature
- US09780029B2 Semiconductor constructions having conductive lines which merge with one another Public/Granted day:2017-10-03
Information query
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