发明申请
- 专利标题: HIGH-TEMPERATURE-RESISTANT METAL-PACKAGED FIBER BRAGG GRATING SENSOR AND MANUFACTURING METHOD THEREFOR
- 专利标题(中): 耐高温金属包装光纤布拉格光栅传感器及其制造方法
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申请号: US14417386申请日: 2012-11-19
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公开(公告)号: US20150247744A1公开(公告)日: 2015-09-03
- 发明人: Shandong Tu , Yun Tu , Yihua Qi , Peng Han , Xiancheng Zhang , Fuzhen Xuan
- 申请人: Shandong Tu , Yun Tu , Yihua Qi , Peng Han , Xiancheng Zhang , Fuzhen Xuan
- 申请人地址: CN Shanghai
- 专利权人: EAST CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY
- 当前专利权人: EAST CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY
- 当前专利权人地址: CN Shanghai
- 优先权: CN201210264642.3 20120727
- 国际申请: PCT/CN2012/084805 WO 20121119
- 主分类号: G01D5/353
- IPC分类号: G01D5/353 ; C25D3/04 ; C25D7/00 ; C25D3/12 ; C23C14/35 ; C23C14/16
摘要:
A manufacturing method for a high-temperature-resistant metal-packaged fiber Bragg grating sensor includes using a regenerated fiber Bragg grating obtained via high-temperature annealing as a sensitive element so that the grating will not be erased when used at high temperature. The method also includes using a magnetron sputtering method which makes an optical fiber and metal combine better to form on the surface of the optical fiber an adhesive layer and a conductive layer, thereby causing little damage to optical fiber because of the absence of the processes of coarsening, sensitization, etc. of electroless plating and the fact that the method is performed in an anhydrous environment. After magnetron sputtering, the method includes using an electroplating method to thicken and deposit a protective layer, and embedding the optical fiber in a flexible-structure metallic substrate through the electroplating method to achieve the all-metal package.
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