发明申请
US20150340255A1 ELECTROSTATIC CHUCK WITH INDEPENDENT ZONE COOLING AND REDUCED CROSSTALK
审中-公开
具有独立区域冷却和减少的CROSSTALK的静电块
- 专利标题： ELECTROSTATIC CHUCK WITH INDEPENDENT ZONE COOLING AND REDUCED CROSSTALK
- 专利标题（中）： 具有独立区域冷却和减少的CROSSTALK的静电块
-
申请号： US14282503申请日： 2014-05-20
-
公开(公告)号： US20150340255A1公开(公告)日： 2015-11-26
- 发明人: Vijay Parkhe , Konstantin Makhratchev
- 申请人： Vijay Parkhe , Konstantin Makhratchev
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; F28F3/12 ; H01L21/683
摘要：
An electrostatic chuck is described with independent zone cooling that leads to reduced crosstalk. In one example, the chuck includes a puck to carry a substrate for fabrication processes, and a cooling plate fastened to and thermally coupled to the ceramic puck, the cooling plate having a plurality of different independent cooling channels to carry a heat transfer fluid to transfer heat from the cooling plate.
公开/授权文献
信息查询
IPC分类:
