Invention Application
US20150344299A1 FABRICATION METHOD OF WAFER LEVEL PACKAGE HAVING A PRESSURE SENSOR 审中-公开
具有压力传感器的水平包装的制造方法

FABRICATION METHOD OF WAFER LEVEL PACKAGE HAVING A PRESSURE SENSOR
Abstract:
A wafer level package having a pressure sensor and a fabrication method thereof are provided. A wafer having the pressure sensor is bonded to a lid, and electrical connecting pads are formed on the wafer. After the lid is cut, wire-bonding and packaging processes are performed. Ends of bonding wires are exposed and serve as an electrical connecting path. A bottom opening is formed on a bottom surface of the wafer, in order to form a pressure sensor path.
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