Invention Application
- Patent Title: METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Patent Title (中): 制造半导体器件的方法
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Application No.: US14881162Application Date: 2015-10-13
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Publication No.: US20160035854A1Publication Date: 2016-02-04
- Inventor: Shih-Fang Tzou , Chien-Ming Lai , Yi-Wen Chen , Hung-Yi Wu , Tong-Jyun Huang , Chien-Ting Lin , Chun-Hsien Lin
- Applicant: UNITED MICROELECTRONICS CORP.
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/423 ; H01L29/66 ; H01L21/8238

Abstract:
A method for fabricating metal gate transistor is disclosed. The method includes the steps of: providing a substrate having a NMOS region and a PMOS region; forming a dummy gate on each of the NMOS region and the PMOS region respectively; removing the dummy gates from each of the NMOS region and the PMOS region; forming a n-type work function layer on the NMOS region and the PMOS region; removing the n-type work function layer in the PMOS region; forming a p-type work function layer on the NMOS region and the PMOS region; and depositing a low resistance metal layer on the p-type work function layer of the NMOS region and the PMOS region.
Information query
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