Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US14920244Application Date: 2015-10-22
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Publication No.: US20160043231A1Publication Date: 2016-02-11
- Inventor: Junichi KOEZUKA , Shinji OHNO , Yuichi SATO , Masahiro TAKAHASHI , Hideyuki KISHIDA
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2011-054610 20110311
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/04 ; H01L27/12

Abstract:
The semiconductor device includes an oxide semiconductor film having a first region and a pair of second regions facing each other with the first region provided therebetween, a gate insulating film over the oxide semiconductor film, and a first electrode overlapping with the first region, over the gate insulating film. The first region is a non-single-crystal oxide semiconductor region including a c-axis-aligned crystal portion. The pair of second regions is an oxide semiconductor region containing dopant and including a plurality of crystal portions.
Public/Granted literature
- US09450104B2 Semiconductor device and manufacturing method thereof Public/Granted day:2016-09-20
Information query
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