Invention Application
US20160052085A1 LASER MACHINING DEVICE AND LASER MACHINING METHOD 有权
激光加工设备和激光加工方法

LASER MACHINING DEVICE AND LASER MACHINING METHOD
Abstract:
A laser processing device converges laser light at an object to be processed so as to form a modified region within the object along a line to cut. The laser processing device comprises a laser light source emitting the laser light, a spatial light modulator modulating the laser light emitted from the laser light source, and a converging optical system converging the laser light modulated by the spatial light modulator at the object. The spatial light modulator displays an axicon lens pattern as a modulation pattern so as to form converging points at a plurality of positions juxtaposed close to each other along a laser light irradiation direction.
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