Invention Application
- Patent Title: IMAGING APPARATUS HAVING A PLURALITY OF MOVABLE BEAM COLUMNS, AND METHOD OF INSPECTING A PLURALITY OF REGIONS OF A SUBSTRATE INTENDED TO BE SUBSTANTIALLY IDENTICAL
- Patent Title (中): 具有多个可移动光束柱的成像装置以及检查要显着标识的基板的多个区域的方法
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Application No.: US14755389Application Date: 2015-06-30
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Publication No.: US20160064185A1Publication Date: 2016-03-03
- Inventor: Kurt Stephen Werder , Lawrence P. Muray , James P. Spallas , William Daniel Meisburger
- Applicant: Keysight Technologies, Inc.
- Main IPC: H01J37/29
- IPC: H01J37/29 ; H01J37/22 ; H01J37/063 ; H01J37/20
Abstract:
An apparatus for inspecting a substrate is described. The apparatus includes an X-Y stage that supports a substrate to be inspected and is operable to move a substrate supported thereby in X and Y directions; and an imaging system including a plurality of beam columns operable to irradiate regions of a substrate supported by the X-Y stage with beams of energy, respectively, discrete from one another. Respective ones of the beam columns are movable relative to others of the electron beam columns.
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