公开(公告)号：US20160064185A1

公开(公告)日：2016-03-03

申请号：US14755389

申请日：2015-06-30

Applicant: Keysight Technologies, Inc.

Inventor： Kurt Stephen Werder ,  Lawrence P. Muray ,  James P. Spallas ,  William Daniel Meisburger

IPC: H01J37/29 ,  H01J37/22 ,  H01J37/063 ,  H01J37/20

CPC classification number: H01J37/292 ,  G06T7/0004 ,  G06T2207/20216 ,  G06T2207/20224 ,  G06T2207/30148 ,  H01J37/023 ,  H01J37/20 ,  H01J37/222 ,  H01J2237/0245 ,  H01J2237/20228 ,  H01J2237/2817 ,  H01L22/00 ,  H01L22/12 ,  H01L22/20

Abstract: An apparatus for inspecting a substrate is described. The apparatus includes an X-Y stage that supports a substrate to be inspected and is operable to move a substrate supported thereby in X and Y directions; and an imaging system including a plurality of beam columns operable to irradiate regions of a substrate supported by the X-Y stage with beams of energy, respectively, discrete from one another. Respective ones of the beam columns are movable relative to others of the electron beam columns.

Abstract translation: 对基板的检查装置进行说明。 该装置包括：X-Y平台，其支撑待检查的基板，并且可操作地移动在X和Y方向上支撑的基板; 以及成像系统，其包括多个光束列，其可操作以分别以彼此离散的能量束照射由X-Y平台支撑的基板的区域。 相应的光束列可相对于电子束列的其他部分移动。

公开(公告)号：US10026588B2

公开(公告)日：2018-07-17

申请号：US14755389

申请日：2015-06-30

Applicant: Keysight Technologies, Inc.

Inventor： Kurt Stephen Werder ,  Lawrence P. Muray ,  James P. Spallas ,  William Daniel Meisburger

IPC: H01J37/00 ,  H01J37/29 ,  H01J37/20 ,  H01J37/22 ,  H01J37/02 ,  H01L21/66

Abstract: An apparatus for inspecting a substrate is described. The apparatus includes an X-Y stage that supports a substrate to be inspected and is operable to move a substrate supported thereby in X and Y directions; and an imaging system including a plurality of beam columns operable to irradiate regions of a substrate supported by the X-Y stage with beams of energy, respectively, discrete from one another. Respective ones of the beam columns are movable relative to others of the electron beam columns.