公开(公告)号：US20160064185A1

公开(公告)日：2016-03-03

申请号：US14755389

申请日：2015-06-30

Applicant: Keysight Technologies, Inc.

Inventor： Kurt Stephen Werder ,  Lawrence P. Muray ,  James P. Spallas ,  William Daniel Meisburger

IPC: H01J37/29 ,  H01J37/22 ,  H01J37/063 ,  H01J37/20

CPC classification number: H01J37/292 ,  G06T7/0004 ,  G06T2207/20216 ,  G06T2207/20224 ,  G06T2207/30148 ,  H01J37/023 ,  H01J37/20 ,  H01J37/222 ,  H01J2237/0245 ,  H01J2237/20228 ,  H01J2237/2817 ,  H01L22/00 ,  H01L22/12 ,  H01L22/20

Abstract: An apparatus for inspecting a substrate is described. The apparatus includes an X-Y stage that supports a substrate to be inspected and is operable to move a substrate supported thereby in X and Y directions; and an imaging system including a plurality of beam columns operable to irradiate regions of a substrate supported by the X-Y stage with beams of energy, respectively, discrete from one another. Respective ones of the beam columns are movable relative to others of the electron beam columns.

Abstract translation: 对基板的检查装置进行说明。 该装置包括：X-Y平台，其支撑待检查的基板，并且可操作地移动在X和Y方向上支撑的基板; 以及成像系统，其包括多个光束列，其可操作以分别以彼此离散的能量束照射由X-Y平台支撑的基板的区域。 相应的光束列可相对于电子束列的其他部分移动。

公开(公告)号：US10026588B2

公开(公告)日：2018-07-17

申请号：US14755389

申请日：2015-06-30

Applicant: Keysight Technologies, Inc.

Inventor： Kurt Stephen Werder ,  Lawrence P. Muray ,  James P. Spallas ,  William Daniel Meisburger

IPC: H01J37/00 ,  H01J37/29 ,  H01J37/20 ,  H01J37/22 ,  H01J37/02 ,  H01L21/66

Abstract: An apparatus for inspecting a substrate is described. The apparatus includes an X-Y stage that supports a substrate to be inspected and is operable to move a substrate supported thereby in X and Y directions; and an imaging system including a plurality of beam columns operable to irradiate regions of a substrate supported by the X-Y stage with beams of energy, respectively, discrete from one another. Respective ones of the beam columns are movable relative to others of the electron beam columns.

公开(公告)号：US09099276B1

公开(公告)日：2015-08-04

申请号：US14162802

申请日：2014-01-24

Applicant: Keysight Technologies, Inc.

Inventor： Lawrence P. Muray ,  Scott W. Indermuehle ,  James P. Spallas ,  Ying Wu ,  Dimitri Klyachko

IPC: H01J37/04 ,  H01J37/05 ,  H01J37/28 ,  G01T1/36

CPC classification number: H01J37/04 ,  H01J37/05 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1205 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/2442 ,  H01J2237/2445

Abstract: A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.

Abstract translation: 包括扫描电子显微镜，X射线检测器和辅助加速电压源的扫描电子显微镜（SEM）和能量色散光谱（EDS）装置。 扫描电子显微镜包括样品保持器和分层电子束柱，其被布置成以初始光束能量朝向样品保持器输出电子束。 辅助加速电压源是在样品架和分层电子束柱之间施加辅助加速电压，以将电子束加速到最终的束能。 在最终光束能量下，电子束能够在起始光束能量下从原子物质的范围比电子束产生多个波长的x射线。

公开(公告)号：US20150213995A1

公开(公告)日：2015-07-30

申请号：US14162802

申请日：2014-01-24

Applicant: Keysight Technologies, Inc.

Inventor： Lawrence P. Muray ,  Scott W. Indermuehle ,  James P. Spallas ,  Ying Wu ,  Dimitri Klyachko

IPC: H01J37/05 ,  G01T1/36 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J37/05 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/04735 ,  H01J2237/1205 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/2442 ,  H01J2237/2445

Abstract: A scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS) apparatus that includes a scanning electron microscope, an x-ray detector, and an auxiliary acceleration voltage source. The scanning electron microscope includes a sample holder, and a layered electron beam column arranged to output an electron beam towards the sample holder at an initial beam energy. The auxiliary acceleration voltage source is to apply an auxiliary acceleration voltage between the sample holder and the layered electron beam column to accelerate the electron beam to a final beam energy. At the final beam energy, the electron beam is capable of generating x-rays at multiple wavelengths from a larger range of atomic species than the electron beam at the initial beam energy.

Abstract translation: 包括扫描电子显微镜，X射线检测器和辅助加速电压源的扫描电子显微镜（SEM）和能量色散光谱（EDS）装置。 扫描电子显微镜包括样品保持器和分层电子束柱，其被布置成以初始光束能量朝向样品保持器输出电子束。 辅助加速电压源是在样品架和分层电子束柱之间施加辅助加速电压，以将电子束加速到最终的束能。 在最终光束能量下，电子束能够在起始光束能量下从原子物质的范围比电子束产生多个波长的x射线。