Invention Application
- Patent Title: INTEGRATED MAGNETORESISTIVE SENSOR, IN PARTICULAR THREE-AXIS MAGNETORESISTIVE SENSOR AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 集成磁传感器,特别是三轴磁传感器及其制造方法
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Application No.: US14938121Application Date: 2015-11-11
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Publication No.: US20160072057A1Publication Date: 2016-03-10
- Inventor: Dario Paci , Marco Morelli , Caterina Riva
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Main IPC: H01L43/12
- IPC: H01L43/12 ; G01R33/09 ; H01L43/08 ; G01R33/00

Abstract:
An integrated magnetoresistive device includes a substrate of semiconductor material that is covered, on a first surface, by an insulating layer. A magnetoresistor of ferromagnetic material extends within the insulating layer and defines a sensitivity plane of the sensor. A concentrator of ferromagnetic material includes at least one arm that extends in a transversal direction to the sensitivity plane and is vertically offset from the magnetoresistor. The concentrator concentrates deflects magnetic flux lines perpendicular to the sensitivity plane so as to generate magnetic-field components directed in a parallel direction to the sensitivity plane.
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