Invention Application
- Patent Title: MULTI-FUNCTION X-RAY METROLOGY TOOL FOR PRODUCTION INSPECTION/MONITORING OF THIN FILMS AND MULTIDIMENSIONAL STRUCTURES
- Patent Title (中): 多功能X射线计量工具用于生产检查/监测薄膜和多层结构
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Application No.: US14521345Application Date: 2014-10-22
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Publication No.: US20160077025A1Publication Date: 2016-03-17
- Inventor: Lin ZHANG , Shuran SHENG , Andrew V. LE
- Applicant: Applied Materials, Inc.
- Main IPC: G01N23/201
- IPC: G01N23/201 ; G01N23/18 ; G01T7/08 ; G01N23/083
Abstract:
An apparatus for integrating metrology and method for using the same are disclosed. The apparatus includes a multi-chamber system having a transfer chamber, a deposition chamber, an etch chamber and a metrology chamber, and a robot configured to transfer a substrate between the deposition chamber or etch chamber and the metrology chamber.
Public/Granted literature
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