发明申请
US20160093518A1 INITIATOR AND METHOD FOR DEBONDING WAFER SUPPORTING SYSTEM 有权
阻尼支撑系统的起动器和方法

INITIATOR AND METHOD FOR DEBONDING WAFER SUPPORTING SYSTEM
摘要:
Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.
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