发明申请
- 专利标题: INITIATOR AND METHOD FOR DEBONDING WAFER SUPPORTING SYSTEM
- 专利标题(中): 阻尼支撑系统的起动器和方法
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申请号: US14788783申请日: 2015-06-30
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公开(公告)号: US20160093518A1公开(公告)日: 2016-03-31
- 发明人: Kyu-Dong JUNG , Jung-Hwan KIM , Dong-Gil LEE , Tae-Je CHO , Kwang-Chul CHOI
- 申请人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2014-0130461 20140929
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; B32B43/00
摘要:
Provided are an initiator and a method for debonding a wafer supporting system. The initiator for debonding a wafer supporting system includes a rotation chuck having an upper surface on which a wafer supporting system (WSS), which includes a carrier wafer, a device wafer, and a glue layer for bonding the carrier wafer and the device wafer to each other, is seated to rotate the wafer supporting system, a detecting module detecting a height and a thickness of the glue layer and a laser module generating a fracture portion on the glue layer through irradiating a side surface of the glue layer with a laser on the basis of the height and the thickness of the glue layer.
公开/授权文献
- US09875918B2 Initiator and method for debonding wafer supporting system 公开/授权日:2018-01-23
信息查询
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