发明申请
- 专利标题: MAGNETORESISTIVE MEMORY DEVICE AND MANUFACTURING METHOD OF THE SAME
- 专利标题(中): 磁记忆体装置及其制造方法
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申请号: US14629120申请日: 2015-02-23
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公开(公告)号: US20160104834A1公开(公告)日: 2016-04-14
- 发明人: Masaru TOKO , Kuniaki SUGIURA , Yutaka HASHIMOTO , Katsuya NISHIYAMA , Tadashi KAI
- 申请人: Masaru TOKO , Kuniaki SUGIURA , Yutaka HASHIMOTO , Katsuya NISHIYAMA , Tadashi KAI
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L43/02 ; H01L43/08
摘要:
According to one embodiment, a manufacturing method of a magnetoresistive memory device includes forming a first magnetic layer on a substrate, forming a magnetoresistive effect element on the first magnetic layer, forming a mask on a part of the magnetoresistive effect element, selectively etching the magnetoresistive effect element using the mask, forming a sidewall insulating film on a sidewall of the magnetoresistive effect element exposed by the etching, selectively etching the first magnetic layer using the mask and the sidewall insulating film and forming a deposition layer containing a magnetic material on a sidewall of the first magnetic layer and the sidewall insulating film, and introducing ions into the deposition layer.
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