Invention Application
- Patent Title: MASS SPECTROMETER, USE THEREOF, AND METHOD FOR THE MASS SPECTROMETRIC EXAMINATION OF A GAS MIXTURE
- Patent Title (中): 质谱仪,其使用方法和气体混合物质谱检测方法
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Application No.: US14967699Application Date: 2015-12-14
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Publication No.: US20160111269A1Publication Date: 2016-04-21
- Inventor: Gennady Fedosenko , Michel Aliman , Hin Yiu Anthony Chung , Albrecht Ranck , Leonid Gorkhover
- Applicant: Carl Zeiss Microscopy GmbH , Carl Zeiss SMT GmbH
- Priority: DE102013213501.7 20130710
- Main IPC: H01J49/04
- IPC: H01J49/04 ; H01J49/14 ; H01J49/00

Abstract:
The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
Public/Granted literature
- US10304672B2 Mass spectrometer, use thereof, and method for the mass spectrometric examination of a gas mixture Public/Granted day:2019-05-28
Information query