Invention Application
US20160122574A1 PHOTORESIST OVERCOAT COMPOSITIONS 有权
摄影师OVERCOAT组合物

PHOTORESIST OVERCOAT COMPOSITIONS
Abstract:
Photoresist overcoat compositions are provided. The compositions comprise: a matrix polymer, an additive polymer a basic quencher and an organic solvent. The additive polymer has a lower surface energy than a surface energy of the matrix polymer, and the additive polymer is present in the overcoat composition in an amount of from 1 to 20 wt % based on total solids of the overcoat composition. The compositions have particular applicability in the semiconductor manufacturing industry for use in negative tone development processes.
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