Invention Application
- Patent Title: PHOTORESIST OVERCOAT COMPOSITIONS
- Patent Title (中): 摄影师OVERCOAT组合物
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Application No.: US14927357Application Date: 2015-10-29
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Publication No.: US20160122574A1Publication Date: 2016-05-05
- Inventor: Choong-Bong LEE , Stefan J. CAPORALE , Jason A. DeSISTO , Jong Keun PARK , Cong LIU , Cheng-Bai XU , Cecily ANDES
- Applicant: Rohm and Haas Electronic Materials LLC
- Main IPC: C09D133/12
- IPC: C09D133/12 ; C09D139/04 ; C09D133/26 ; G03F7/11

Abstract:
Photoresist overcoat compositions are provided. The compositions comprise: a matrix polymer, an additive polymer a basic quencher and an organic solvent. The additive polymer has a lower surface energy than a surface energy of the matrix polymer, and the additive polymer is present in the overcoat composition in an amount of from 1 to 20 wt % based on total solids of the overcoat composition. The compositions have particular applicability in the semiconductor manufacturing industry for use in negative tone development processes.
Public/Granted literature
- US09581904B2 Photoresist overcoat compositions Public/Granted day:2017-02-28
Information query
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