Invention Application
- Patent Title: MEMORY CELL PILLAR INCLUDING SOURCE JUNCTION PLUG
- Patent Title (中): 存储单元支柱,包括源结点插头
-
Application No.: US14536021Application Date: 2014-11-07
-
Publication No.: US20160133638A1Publication Date: 2016-05-12
- Inventor: Fatma Arzum Simsek-Ege , Krishna K. Parat , Luan C. Tran , Meng-Wei Kuo , Yushi Hu
- Applicant: Micron Technology, Inc.
- Main IPC: H01L27/115
- IPC: H01L27/115

Abstract:
Some embodiments include apparatuses and methods having a source material, a dielectric material over the source material, a select gate material over the dielectric material, a memory cell stack over the select gate material, a conductive plug located in an opening of the dielectric material and contacting a portion of the source material, and a channel material extending through the memory cell stack and the select gate material and contacting the conductive plug.
Public/Granted literature
- US09780102B2 Memory cell pillar including source junction plug Public/Granted day:2017-10-03
Information query
IPC分类: