Invention Application
US20160176021A1 UV CURABLE CMP POLISHING PAD AND METHOD OF MANUFACTURE 审中-公开
UV可固化CMP抛光垫及其制造方法

UV CURABLE CMP POLISHING PAD AND METHOD OF MANUFACTURE
Abstract:
A method of fabricating a chemical mechanical polishing pad includes introducing polymer precursors containing acrylate functional groups into a mold, providing abrasive particles and a photo-initiator in the polymer precursors to form a mixture, and while the mixture is contained between a bottom plate and a top cover of the mold, exposing the mixture to ultraviolet radiation through a transparent section of the mold to cause the polymer precursors to form radicals, forming a polymer matrix from the polymer precursor by causing the radicals to cross-link with one another. The polishing layer includes the polymer matrix having the abrasive particles dispersed therein.
Public/Granted literature
Information query
Patent Agency Ranking
0/0